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The detection method of the silicon melting process in the CZ single-crystal furnace

机译:CZ单晶炉中硅熔化过程的检测方法

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The Melting process is one of the main processes in the Czochralski method. Detecting the melting process is important for entire automation of the CZ crystal furnace. In regards to the furnace melting process, this paper presents a kind of image-based method to detect the size of the silicon ingot at later stages of the process. It could achieve the purpose of optimizing the heating power and process automation by monitoring the process. In the summary of the basic characteristic of the image of melting process, this paper proposes an image processing method which integrates silicon ingot color features, a multi-scale morphological gradient, an improved watershed transformation and the Bhattacharyya distance to separate the silicon ingots from the image background.
机译:熔化过程是Czochralski方法中的主要过程之一。 检测熔化过程对于CZ晶体炉的整个自动化是重要的。 关于熔炉熔化过程,本文呈现了一种基于图像的方法,以检测该方法的后期硅锭的尺寸。 它可以通过监控该过程来达到优化加热功率和过程自动化的目的。 在熔化过程图像的基本特征的概述中,本文提出了一种图像处理方法,其整合硅锭颜色特征,多尺度形态梯度,改进的流域变换和Bhattacharyya距离,以将硅锭与硅锭分离 图像背景。

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