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The detection method of the silicon melting process in the CZ single-crystal furnace

机译:CZ单晶炉中硅熔化过程的检测方法

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The Melting process is one of the main processes in the Czochralski method. Detecting the melting process is important for entire automation of the CZ crystal furnace. In regards to the furnace melting process, this paper presents a kind of image-based method to detect the size of the silicon ingot at later stages of the process. It could achieve the purpose of optimizing the heating power and process automation by monitoring the process. In the summary of the basic characteristic of the image of melting process, this paper proposes an image processing method which integrates silicon ingot color features, a multi-scale morphological gradient, an improved watershed transformation and the Bhattacharyya distance to separate the silicon ingots from the image background.
机译:熔融过程是切克劳斯基方法中的主要过程之一。检测熔化过程对于CZ晶体炉的整个自动化非常重要。关于熔炉的熔化过程,本文提出了一种基于图像的方法来在该过程的后续阶段检测硅锭的尺寸。通过监视过程可以达到优化加热功率和过程自动化的目的。在对熔化过程图像基本特征的概述中,本文提出了一种图像处理方法,该方法结合了硅锭的颜色特征,多尺度形态梯度,改进的分水岭变换和Bhattacharyya距离,将硅锭与硅锭分离。图像背景。

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