CZ单晶炉中碳和氧的产生及其对单晶硅生长的影响

摘要

In this paper,elemental crystal furnace,FT-CZ2008 type,made in Ferro Tec group,is research object.The basic structure of CZ elemental crystal furnace is introduced,and the growth techniques of monocrystalline silicon are expounded.Influence factors of carbon and oxygen generating in this system is analyzed from 3 aspects,the structure of elemental crystal furnace and monocrystalline silicon production technology and others.Experimental data and influence degree from carbon and oxygen to monocrystalline silicon production quality is concluded.Help for enterprise can be expected in further improving structure of elemental crystal furnace,reforming technology of the monocrystalline silicon growth and improving the quality of the monocrystalline silicon production.%以FerroTec集团生产的FT-CZ2008型单晶炉为研究对象,介绍CZ单晶炉的基本结构,阐述单晶硅的生长工艺.从单晶炉炉体结构和单晶硅的生产工艺及其他因素共3个方面分析该系统中影响碳和氧生成的因素,并给出实验数据分析结果,得出碳和氧对单晶硅生产质量的影响程度,期望对企业进一步改进单晶炉结构、革新单晶硅生长工艺、提高单晶硅生产质量有所帮助.