This study applies single crystal titanium nitride powder to fabricate titanium nitride film using vacuum kinetic spray process. Transmission electron microscopy were used to investigate the microstructure of as-fabricated films using different process conditions. Nanoindentation and scratch tests were used to examine the microhardness and the adhesion strength, respectively. Plastic deformation features (i.e., amorphization, rotated grain, and slip bands) revealed that elastic-to-inelastic transition at high strain rate and high pressure during the process is vital for the grain refinement and film growth. Hardness and adhesion strength increased due to the better consolidated structure with finer grains achieved at larger gas flow rate.
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