Integrated Computer Models of 3-D Comb Drive Electrostatic MEMS Structures

摘要

This paper deals with the numerical modeling of 3D structure of surface micromachined MEMS different comb drive geometries. The paper is devoted to the complex strategy of modeling, proposed by authors, of micro-actuators of comb structure. This methodology is based on vector field 3-D structural models and the object oriented models and lumped parameters as well, applied to the different structure of MEMS.