Circuit for electrostatically driving a plant such as a comb-drive microelectromechanical system (MEMS) mirror and related subsystem, system, and method

摘要

A drive circuit includes a generator and a driver. The generator generates a signal having a period and a varying amplitude during a driving portion of the period, and the driver is coupled to the generator and drives a plate of an electrostatically drivable plant with the signal. The drive circuit may be used to drive a mirror plate of a comb-drive MEMS mirror.