Blue photoluminescence emission from thermal SiO/sub 2/ films implanted with carbon

摘要

The structures formed after the implantation of carbon in thermal SiO/sub 2/ and annealing present visible photoluminescence (PL) bands at room temperature. The peak wavelength and intensity of PL bands depend strongly on the temperature of annealing. In contrast, only very weak PL bands are observed after the implantation of argon in thermal SiO/sub 2/ and similar annealing. IR, Raman, SIMS and HRTEM were also used to characterize the microstructure of the carbon or argon implanted thermal SiO/sub 2/ films. These observations show that carbon aggregates are probably the origin of blue PL bands.