Blue radiation Si: The SiO2 film the blue luminous element and the blue radiation Si which possess that: On the production mannered null

摘要

PROBLEM TO BE SOLVED: To provide a new light-emitting Si:SiO₂ film obtained by a very simple process without annealing treatment.;SOLUTION: The blue light-emitting film is formed on a substrate by using a target of Si and SiO₂, and carrying out simultaneous sputtering of the Si and the SiO₂ while regulating the volume percentage of the Si in the SiO₂ based on the whole film so as to be 0.75-4.5% to form the blue light-mitting Si:SiO₂ film on a substrate.;COPYRIGHT: (C)2004,JPO