We report on a novel, polysilicon surface-micromachinedone-dimensional (1-D) analog micromirror array. Large continuousDC scan angle (23.6° optical) and low operating voltage (6V) havebeen achieved using vertical comb-drive actuators. The actuatorsand torsion springs are placed underneath the mirror (137 × 120μm2) to achieve high fill-factor (91%). The measured resonantfrequency of the mirror ranges from 3.4 kHz to 8.1 kHz. The staticscanning characteristics show good uniformity (<±3.2%) for a 1 ×10 array with a mirror pitch of 150 μm. The measured DCscanning characteristics and resonant frequencies agree well withtheoretical values. This micromirror array has applications inoptical wavelength-division multiplexed (WDM) routers andwavelength-selective crossconnect (WSXC).
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