Prototype of atomic force microscope with high resolution optical microscope for observing magnetic nanodot arrays

摘要

This paper is dedicated to develop an atomic force microscope (AFM) system coupled with a high resolution optical microscope (OM), which serves to observe AFM image from a desired micro-area. The system employs through-the-lens optical path for detecting atomic force based on optical lever. By switching the objective lenses from low to high magnification, a micro-area for obtaining AFM image can be easily found. AFM images of magnetic nanodot arrays with 300 nm and 150 nm pitches are obtained from two local micro-areas using the system. The results demonstrate the proposed prototype has the sufficient function to find out a micro-area for obtaining AFM image.