NON-CONTACT ATOMIC FORCE MICROSCOPE, MAGNETIC FORCE MICROSCOPE, AND STATIC ELECTRICITY MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To reproduce a signal having a higher frequency by an information- reproducing apparatus.;SOLUTION: A cantilever is forcibly vibrated near at least a secondary high-order resonance frequency in a cantilever, and the change in the amplitude phase, or resonance frequency is detected, thus measuring a force gradient in force operating between the probe and the sample surface.;COPYRIGHT: (C)2003,JPO