Directional atomic force microscope and method of observing a sample with the microscope

摘要

An atomic force microscope includes a vibrator which imparts vibration between a probe and a sample such that a relative vertical vibration and a relative lateral vibration are superimposed. A method of observing a sample with the microscope includes the steps of imparting phase-controlled vertical and lateral vibration between a sample and a probe so that the probe moves along a straight line or a ring relative to the sample, controlling the direction of the straight line or the ring, and measuring the amplitude and/or the phase of the bending vibration and/or the torsional vibration of a cantilever excited by the vibration.