MINIATURE HIGH SENSITIVITY ULTRASONIC TRANSDUCERS USING EPITAXIAL PZT THIN FILMS GROWN ON EPITAXIAL Γ-Al_2O_3/Si SUBSTRATES FOR SMART DEVICES

摘要

Miniature high sensitivity ultrasonic transducers have been fabricated using epitaxial lead zirconate titanate, Pb (Zr_x, Ti_(1-x))O_3 (PZT), thin films grown on epitaxial SrRuO_3/Pt/γ-Al_2O_3/Si substrates. The 1.3μm-thick PZT films were prepared by a sol-gel method. The receiving sensitivity of the fabricated transducer was measured at the frequency of 2.5 MHz. The fabricated transducer has good receiving sensitivity.