The 300mm Technology has forced the semiconductor industry to take a broader perspective on the classical understanding of production and Shop-Floor Control. In consequence the focus shifted from the perspective of Transport Automation and Manufacturing Execution Systems to the integrated Factory, viewing all involved elements for semiconductor production. In Pre-300mm, the process-engineering domain saw limited overlap to production logistic and transport. Today the linkage and integration of process control and shop-floor control and production logistic is acknowledged as key factor for operational excellence. They are the Enabling Technologies, for the high-end "Manufacturing Operations Management". The required technologies for the integrated manufacturing are not available off-the-shelf in the market. Unlike in the financial and enterprise resource planning area, the shop-floor is lacking of predefined workflows, addressing and offering the work-procedures and-processes of a highly automated semiconductor operations. This paper gives real-case insight on (1) how to build a comprehensive standard for the high-end automation and production efficiency. (2) how to increase process control, equipment utilization and factory uptime towards better cycle time and output through an integrated industrial automation solution baseline for shop-floor and engineering.
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