Vertically aligned carbon nanotubes (CNTs) have been produced using various type of plasma enhanced chemical vapor deposition (PECVD). Catalysts such as Ni, Co, and Fe were used for the growth of CNTs. To explain the effect of growth parameters including catalysts on the growth and emission characteristics of CNTs in PECVD active species from source gases under different growth condition and catalysts were analyzed using optical emission spectroscopy (OES) with theoretical calculation of the surface reaction in different catalysts.
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