VOLUME PRODUCTION IN ELTRAN~(~R) SOI-Epi Wafer~(TM)s

摘要

The SOI market has been growing steadily. As the market grows, so should be the variety of SOI wafer specifications available, and soon 300 mm SOI wafers will be needed. While responding to these market needs, we at Canon are also putting the quality control systems in place and are meeting requirements for mass production. The fabrication facility for ELTRAN~(~R) has been expanded twice, deploying its newly designed equipment. This paper discusses our activities pertaining to the ramp-up of mass production for ELTRAN~(~R), looking at the technology from both the technical and cost concerned perspectives.