Micro-mirror design of an electrostatic MEMS optical switch

摘要

Optical switch is a key supporting technologies In all-optical network (AON). Among many kinds of schemes the electrostatic MEMS optical switch has some advantages and plays a very important role In the researching of all-optical switch. In this paper, the elementary design of a micro-mirror of electrostatic MEMS optical switch is discussed. The Influence of micro-mirror size on energy consumption of the optical switch is analyzed and the way to reduce the voltage is given.