On the feasibility of MEMS micro-mirrors for adaptive alignment in free-space optical interconnects.

摘要

This thesis is an investigation in the feasibility of the use of MEMS micro-mirror devices for adaptive alignment applications in free-space optical interconnects. In this scheme, dynamic beam steering is used as the mechanism to improve minimum system tolerances. Based on the parameters of a previously implemented interconnect, an optimized integrated design is presented. Two sets of micro-mirror designs were prototyped using the MUMPs foundry service. Numerical modeling of the integrated system indicated significant improvement in lateral and angular tilt misalignment tolerances using the MEMS beam steering system. The effect of mirror surface curvature on the integrated system was also investigated, indicating a high dependency of system performance on micro-mirror surface sag. Testing and characterization of the mirror prototypes indicated significant deviation from theoretical predictions. Nevertheless, future work in optimizing mirror designs will allow for improved performance.