The use of STADIUM statistical TCAD simulation methodology in industrial environments

摘要

The software program called STADIUM has been developed by researchers at Florida Institute of Technology. The purpose of STADIUM is to facilitate the statistical design and simulation of integrated processes, devices and products. It is a software shell which uses existing simulators in a design of experiments statistical methodology, and which allows the estimation of the statistical response of the manufacturing environment. Some of the details of STADIUM are described together with activities of the Florida SEMATECH Center of Excellence to implement this software in several industrial environments.