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On the role of adhesion in plastic packaged chips under thermal cycling stress

机译:在热循环应力下塑料包装芯片中粘附在塑料包装芯片中的作用

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Scanning acoustic microscopy (SAM) was used to evaluate the degradation of adhesion on a blown up sample, i.e. a Si-beam coated only on the passivated side with the molding compound under consideration. Such a bending beam sample offers two advantages for evaluation by SAM over conventionally plastic mounted chips: (1) for the acoustic waves the sample is flat, which helps to eliminate or reduce the influence of chip topography, and (2) the bending stress tends to open any partial delamination, giving better defined conditions for SAM examination. From the SAM analysis of the bending beam sample a very low stress molding compound, which had caused an unexpectedly high failure rate, was found to show poor adhesion after thermal cycling in delamination near the corners of the sample. No delaminations could be observed by means of SAM at molded product test chips, however. Thus, it is concluded that poor adhesion of the molding compound which caused delaminations in the bending beam's corner regions resulted in an increased chip failure rate.
机译:使用扫描声学显微镜(SAM)来评估吹入样品上的粘附性的粘附,即仅在钝化侧涂覆的Si-梁,其考虑的模塑化合物涂覆。这种弯曲梁样品提供了由SAM通过SAM通过传统上塑料安装芯片评估的两个优点:(1)对于声波,样品是平的,这有助于消除或减少芯片地形的影响,并且(2)弯曲应力趋于打开任何部分分层,为SAM考试提供更好的定义条件。从弯曲光束样品的SAM分析,发现非常低的应力成型化合物,这引起了出乎意料的高失效率,发现在样品的角落附近热循环后热循环后的粘附性差。然而,通过模塑产品试验芯片可以通过SAM观察除去分层。因此,得出结论:在弯曲梁角区域中引起分层的模塑化合物的粘附性差导致芯片失效率增加。

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