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On the role of adhesion in plastic packaged chips under thermal cycling stress

机译:粘合在热循环应力下在塑料封装芯片中的作用

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Scanning acoustic microscopy (SAM) was used to evaluate the degradation of adhesion on a blown up sample, i.e. a Si-beam coated only on the passivated side with the molding compound under consideration. Such a bending beam sample offers two advantages for evaluation by SAM over conventionally plastic mounted chips: (1) for the acoustic waves the sample is flat, which helps to eliminate or reduce the influence of chip topography, and (2) the bending stress tends to open any partial delamination, giving better defined conditions for SAM examination. From the SAM analysis of the bending beam sample a very low stress molding compound, which had caused an unexpectedly high failure rate, was found to show poor adhesion after thermal cycling in delamination near the corners of the sample. No delaminations could be observed by means of SAM at molded product test chips, however. Thus, it is concluded that poor adhesion of the molding compound which caused delaminations in the bending beam's corner regions resulted in an increased chip failure rate.
机译:使用扫描声显微镜(SAM)来评估在吹胀样品(即仅在钝化侧上涂覆有所考虑的模塑料)的Si梁上的粘附力的降低。与传统的塑料安装芯片相比,这种弯曲梁样品具有SAM评估的两个优点:(1)对于声波而言,样品是平坦的,这有助于消除或减少芯片形貌的影响;(2)弯曲应力趋向于打开任何局部分层,为SAM检查提供更好的定义条件。根据弯曲梁样品的SAM分析,发现一种非常低应力的模塑料,该化合物造成了意外的高故障率,在热循环后,由于样品拐角附近的分层而显示出较差的粘合性。但是,通过SAM在成型产品测试芯片上未观察到分层。因此,可以得出结论,模塑料的不良粘合性导致弯曲梁的拐角区域发生分层,从而导致切屑故障率增加。

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