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Novel Monolayer-enhanced Non-Conductive Film (NCF) for Ultra-Fine Pitch High Performance Interconnect in Lead-free Electronics

机译:新型单层增强的非导电膜(NCF)用于无铅电子器件中的超细间距高性能互连

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With the aim of improving electrical properties of non-conductive film (NCF), two thiol (-SH) terminated 驴-conjugated molecular wires are introduced into the interface of NCF. The conjugated molecular wires can be well assembled on the Au electrodes and improve the interfacial properties of the NCF joints. Biphenyldithiol (BPD) exhibits higher thermal stability after curing condition (150掳C) than 1,4-benezenedithiol (BDT) due to the higher aromaticity (more aromatic rings) and thus more rigid structure. Formation of self-assembled monolayer on Au electrodes can tune the effective work function (驴) of Au electrodes and reduce the tunnel resistivity. Therefore, the joint resistance of NCF joints, which is the sum of tunnel resistance and constriction resistance, can be significantly reduced from 0.15 脳103 驴 to 0.1 脳 103 驴 and 0.05 脳 103 驴 with BDT and BPD, respectively. The improved electrical conduction and current carrying capability enables the application of NCF in fine pitch and high performance interconnects in microelectronics.
机译:随着改善非导电膜(NCF)的电性能的目的,将两个硫醇(-SH)终止的驴缀合的分子线引入NCF的界面。共轭分子线可以在Au电极上良好地组装,并改善NCF关节的界面性质。由于芳香度(更多芳环)和更刚性的结构,Biphenyldithiol(BPD)在固化条件(150℃)之后的热稳定性高于1,4-苯二硫醇(BDT)和更刚性的结构。 Au电极上的自组装单层形成可以调谐Au电极的有效功函数(驴)并降低隧道电阻率。因此,NCF关节的关节电阻分别与BDT和BPD分别具有0.15℃至0.1103℃的0.15℃至0.1℃的显着降低。改进的电导和电流承载能力使得能够在微电子中的细距和高性能互连中应用NCF。

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