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Reliability Study of Copper Pillar Bump Interconnects for Acoustic Wave - Wafer Level Package

机译:声波 - 晶片型封装铜柱凸块互连的可靠性研究

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Replacing solder ball interconnects through copper pillar bump (CPB) interconnects on acoustic wave components (AWC) like SAW (surface acoustic wave) filters saves valuable chip space and facilitates chip miniaturization. In this contribution, we present our very first assembly and reliability results for CPBs on lithium niobate chips with TFAP(tm) (Thin Film Acoustic Package) for SAW filters. The CPBs consist of a Cu/Ni/SnAg layer stack and are soldered on a test board with Cu/Ni/Au finish. Leaving aside premature failures due to poor soldering, CPBs withstand 770 cycles of RCoT (Rapid Change of Temperatur, -40°C / + 125°C) reliability testing. The solder joints were investigated via cross section micrographs. Additionally, uHAST (Accelerated Moisture Resistance - unbiased HAST), DH (Dry Heat) and DHSS (Damp Heat Steady State) reliability tests were performed.
机译:通过铜柱凸块(CPB)在锯(表面声波)滤波器上的铜柱凸块(CPB)互连上替换焊球互连,如SAW(表面声波)滤波器可节省有价值的芯片空间并促进芯片小型化。在这一贡献中,我们向我们的第一个装配和可靠性结果提供了TFAP的锂铌酸盐芯片上的CPB(tm) (薄膜声封装)用于锯过滤器。 CPBS由Cu / Ni / Snag层堆叠组成,并在具有Cu / Ni / Au的测试板上焊接。由于焊接差,CPBS占用过早故障,CPB凭借770个循环的RCOT(温度快速变化,-40°C / + 125°C)可靠性测试。通过截面显微照片研究焊点。此外,进行了uHAST(加速耐湿性 - 无偏的Hast),DH(干热)和DHSS(潮湿热稳态)可靠性测试。

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