首页> 外文会议>Electronic Components and Technology Conference, 2001. Proceedings., 51st >Microwave frequency model of wafer level package and increasedloading effect on Rambus memory module
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Microwave frequency model of wafer level package and increasedloading effect on Rambus memory module

机译:晶圆级封装的微波频率模型及其增强在Rambus内存模块上的加载效果

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A wafer level package (WLP) has been developed as a cost effectivepackaging method compared to the μBGA package, and especially appliedto the Rambus DRAM (RDRAM) package. The maximum allowable thickness ofthe stress buffer layer on the WLP is limited to about 20 μm, due tothe limitation of the present spin coating process technology. Hence,the thickness of the stress buffer layer is much smaller than that ofthe elastomer (175 pm) used as a dielectric layer in the μBGApackage. Consequently, due to this extremely small distance between themetal traces on the WLP and the silicon substrate, the capacitiveloading of the WLP on the RIMM (Rambus in-line memory module) issignificantly increased. The increased capacitive loading by the WLPresults in a decrease in the effective line impedance and an increase inthe propagation delay on the RIMM, while the target line impedance onthe RIMM is 28 Ω±10%. Therefore, careful designconsiderations are required at the package design level and at themodule design level, to compensate for the increased capacitive loadingby the WLP. In this paper, we firstly introduce the equivalent circuitmodel of the WLP interconnection lines using the S-parameter measurementin the microwave frequency region up to 5 GHz. Then, we suggest theelectrical design methodology of the WLP and the module to compensatefor the increased loading capacitance of the WLP
机译:晶圆级封装(WLP)已被开发为具有成本效益的产品 封装方法与μBGA封装相比,尤其适用 到Rambus DRAM(RDRAM)封装。最大允许厚度 由于 当前旋涂工艺技术的局限性。因此, 应力缓冲层的厚度远小于应力缓冲层的厚度。 μBGA中用作介电层的弹性体(175 pm) 包裹。因此,由于 WLP和硅基板上的金属走线,电容 将WLP加载到RIMM(Rambus在线存储模块)上是 显着提高。 WLP增加的电容负载 导致有效线路阻抗降低,而 RIMM上的传播延迟,而目标线路阻抗在 RIMM为28Ω±10%。因此,精心设计 包装设计级别和 模块设计水平,以补偿增加的容性负载 由WLP。在本文中,我们首先介绍等效电路 S参数测量的WLP互连线模型 在高达5 GHz的微波频率范围内。然后,我们建议 WLP的电气设计方法论和补偿模块 用于增加WLP的负载电容

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