首页> 外国专利> WAFER LEVEL CHIP SCALE PACKAGE, METHOD OF MANUFACTURING THE SAME, AND SEMICONDUCTOR CHIP MODULE INCLUDING THE WAFER LEVEL CHIP SCALE PACKAGE

WAFER LEVEL CHIP SCALE PACKAGE, METHOD OF MANUFACTURING THE SAME, AND SEMICONDUCTOR CHIP MODULE INCLUDING THE WAFER LEVEL CHIP SCALE PACKAGE

机译:晶圆级芯片包装,制造晶圆的方法以及包括晶圆级芯片包装的半导体芯片模块

摘要

Provided are a wafer level chip scale package in which a redistribution process is applied at a wafer level, a manufacturing method thereof, and a semiconductor chip module including the wafer level chip scale package. The wafer level chip scale package includes a semiconductor chip having a bonding pad, a first insulating layer disposed on the semiconductor chip so as to expose the bonding pad, a redistribution line disposed on the exposed bonding pad and the first insulating layer, a sacrificial layer disposed below a redistribution pad of the redistribution line, a second insulating layer disposed on the redistribution line so as to expose the redistribution pad and including a crack inducement hole disposed beside the sacrificial layer, and an external connection terminal attached to the redistribution pad.
机译:提供了其中在晶片级上进行再分配工艺的晶片级芯片级封装,其制造方法以及包括该晶片级芯片级封装的半导体芯片模块。晶片级芯片级封装包括:具有接合垫的半导体芯片,设置在半导体芯片上以暴露接合垫的第一绝缘层,布置在暴露的接合垫上的再分配线和第一绝缘层,牺牲层。绝缘层设置在重分布线的重分布垫下方,第二绝缘层设置在重分布线上以暴露重分布垫并包括位于牺牲层旁边的裂纹诱发孔,外部连接端子附接至重分布垫。

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