Electron and hole effective mobilities of ultra-thin SOI N- and P-MOSFETs have been measured at different temperatures using a special test structure able to circumvent parasitic resistance effects. At large inversion densities (N/sub inv/) ultra-thin SOI mobility can be higher than in heavily doped bulk MOS due a lower effective field and it is largely insensitive to silicon thickness (T/sub SI/). However, at small Ni/sub inv/ the mobility is clearly reduced for decreasing T/sub SI/. The effective mobility data are used to study the implications for ultra-short MOS transistor performance at device simulation level.
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机译:在不同的温度下,使用能够避免寄生抗性效应的特殊测试结构,在不同温度下测量了超薄SOI和P-MOSFET的电子和空穴的有效迁移率。在大反演密度(n / sub inv /)超薄SOI移动性可以高于较低的有效场的重掺杂的散装MO,并且它对硅厚度(T / SUB SI /)大不疑。但是,在小的Ni / sub inv / sub inv / sub inv / sub invility中显然减少用于降低t / sub si /。有效移动性数据用于研究设备仿真水平的超短MOS晶体管性能的影响。
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