We have developed a modified LEC method with a thermal baffle (TB), by which low dislocation density InP crystals can be grown. In this method, a thermal baffle is set on top of the crucible in order to suppress the gas convection and thus to improve the temperature gradient in the LEC furnace. The dislocation density depends not only on the temperature gradient but also on the other growth conditions, such as crystal/crucible rotational speeds, cooling conditions, and crucible weight. The rotational condition is an important factor for the reduction of the dislocation density since the solid/liquid (SL)interface shape changes with the rotational conditions.
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