Monolithic Integration of Digital MEMS Thermometer and temperature compensated RTC on 1P6M ASIC compatible CMOS MEMS process

摘要

A monolithic resonator based digital MEMS thermometer has been proposed. It is further integrated with Real time clock (RTC) to demonstrate multifunction design as thermometer and temperature compensation. The MEMS/ASIC combined SOC is fabricated on UMC 0.18μm 1P6M ASIC compatible CMOS MEMS process. The resonant frequency of thermometer has been simulated with sensitivity ?18Hz/°C. The temperature dependency of RTC frequency is 13.15(ppm/°C) in a temperature range from 20 °C to 80 °C. Power consumption of the readout circuit is 440.3μW.