首页> 外文会议>Electronic Components and Technology Conference (ECTC), 2012 IEEE 62nd >Stress evolution in an encapsulated MEMS package due to viscoelasticity of packaging materials
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Stress evolution in an encapsulated MEMS package due to viscoelasticity of packaging materials

机译:由于封装材料的粘弹性,封装的MEMS封装中的应力演变

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Packaging materials influence greatly on reliability and performance of electronics components. While, materials such as molding compound protect the package from the environment; different mechanical properties of materials will inevitably introduce stress to the package. In this study, materials' viscoelastic effect on packaging stress in a MEMS sensor was studied using finite element analysis after measuring the properties of molding compound and die-attach materials in a series of stress relaxation experiments. The stress distribution, stress-time and stress-temperature relationship, were simulated under different final temperatures and cooling rates. It is found that viscoelasticity has significant effect on the packing stress, especially at higher temperature.
机译:包装材料极大地影响了电子元件的可靠性和性能。同时,诸如模塑料的材料可以保护包装免受环境影响;材料的不同机械性能不可避免地会给包装带来压力。在这项研究中,在一系列应力松弛实验中,通过测量模塑料和管芯附着材料的性能,使用有限元分析研究了材料对MEMS传感器中封装应力的粘弹性效应。在不同的最终温度和冷却速率下,模拟了应力分布,应力时间和应力温度关系。发现粘弹性对堆积应力具有显着影响,尤其是在较高温度下。

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