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Z-axis Interconnections for Next Generation Packaging

机译:下一代包装的Z轴互连

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In this paper, the use of electrically conducting adhesives(ECA) to form z-axis interconnections for next generationpackaging is discussed. In particular, current efforts related toZ-axis interconnections for device level fabrication,integration, and electrical performance are highlighted. A fewoptimized ECAs were used for hole fill applications tofabricate Z-axis interconnections in laminates. Conductivejoints were formed during composite lamination using theECA. Around 5,000 to 200,000 through holes in the joiningcores, formed by laser or mechanical drilling, and havingdiameters ranging from 50 μm to 750 μm, were filled with anoptimized conducting adhesive. The adhesive-filled joiningcores/layers were laminated with circuitized subcomposites toproduce a composite structure. As a case study, a variety of zaxisinterconnect constructions for a flip-chip plastic ball gridarray package, rigid-flex, rigid-rigid, package-interposerpackage(PIP), RF structures, and PWBs were fabricated andevaluated at both the subcomposite and composite levels tounderstand structural and electrical integrity. Electrically, Sparametermeasurements showed very low loss at multigigahertzfrequencies. The losses were low enough to supporttypical SERDES up to 15 Gbps over 750 mm. The presentprocess allows fabrication of z-interconnect conductive jointshaving diameters in the range of 55 to 500 μm. The processesand materials used to achieve smaller feature dimensions,satisfy stringent registration requirements, and achieve robustelectrical interconnections are discussed.
机译:在本文中,使用导电胶 (ECA)形成下一代的Z轴互连 包装进行了讨论。特别是,当前的努力与 用于设备级制造的Z轴互连, 集成度和电气性能突出显示。一些 优化的ECA用于孔填充应用,以 在层压板中制造Z轴互连。导电性 在复合层压过程中,使用 ECA。连接处约有5,000至200,000个通孔 通过激光或机械钻孔形成的芯,并具有 直径从50μm到750μm的范围内填充有 优化的导电胶。粘合剂填充连接 芯/层与电路化的亚复合材料层压在一起 产生复合结构。作为案例研究,各种zaxis 倒装芯片塑料球栅的互连结构 阵列包装,刚柔结合,刚硬结合,内包装 (PIP),RF结构和PWB被制造出来, 在子复合层和复合层都进行了评估 了解结构和电气完整性。电气参数 测量结果表明,在千兆赫兹时损耗非常低 频率。损失很低,足以支撑 750 mm内的典型SERDES高达15 Gbps。现在 工艺允许制造z-interconnect导电接头 具有在55至500μm范围内的直径。流程 和用于实现较小特征尺寸的材料, 满足严格的注册要求,并实现强大的功能 讨论了电气互连。

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