Through-silicon via (TSV) depletion effect

摘要

The effects of through-silicon via (TSV) depletion are analyzed based on the frequency- and time-domain measurements in this paper. As TSV dc bias voltage increases, a TSV depletion region is generated; this region decreases TSV noise coupling at frequencies below 1 GHz. It also creates duty-cycle distortion of the coupled signal, which results from the nonlinearity of the TSV.