Study of gas sensor based on adsorption heat measurement using Y-cut quartz crystal microbalance

摘要

In this paper, we describe the gas sensor using Y-cut quartz resonator. The sensor response property is decided not only by the mass loading effect, but also the heat of adsorption caused when the gas molecule is adsorbed. This type of sensor has a response characteristic different from the conventional sensors using AT-cut resonator that is stable against temperature change around room temperature, even if the gas molecule adsorption characteristic on the surface of the sensor is the same.