Quartz Crystal Microbalance Sensors for Simultaneously Measurement of Electrical Properties and Mass Changes

摘要

The present invention relates to a new quartz crystal micro-balance and, more specifically, to the new quartz crystal micro-balance which measures mass change and electrical property at the same time. The quartz crystal micro-balance of the present invention uses a quartz vibrator which forms a first electrode for vibrating the quartz vibrator on a first surface of the quartz vibrator and forms a second electrode for measuring electrical property of a sample on a second surface of the quartz vibrator.