QUARTZ CRYSTAL MICROBALANCE CORROSION SENSOR, CORROSION SENSOR SYSTEM, AND CORROSION GAS MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a quartz crystal microbalance corrosion sensor, a corrosion sensor system, and a corrosion gas measuring method in order to measure and monitor a corrosion gas continuously for a long time.;SOLUTION: A quartz crystal microbalance corrosion sensor includes a quartz crystal disc, sensor electrodes provided on the front and rear surfaces of the quartz crystal disc, and deterioration measuring electrodes provided on the front and rear surfaces of the quartz crystal disc.;COPYRIGHT: (C)2013,JPO&INPIT