Low temperature (77K) quartz microbalance adsorption measurement device using 15 ° Y-cut quartz vibrator

摘要

The present invention was made for the purpose of applying a quartz microbalance method to the adsorption measurement of gas molecules mainly made of liquid nitrogen at 77K. Since the existing crystals such as AT-cut were developed to have a small temperature coefficient near room temperature, the 77K has a very large temperature coefficient, which makes it difficult to measure and the temperature coefficient of the crystal has directionality. A new 15 ° Y-cut with a small temperature coefficient has been developed. The crystal microbalance using this crystal has a small temperature coefficient of resonant frequency of 0.1 Hz / K near 77K and the mechanical Q-value of the vibrator is 2.5 × 10 ⁵ , which can be used for the measurement of gas molecules adsorbed on the electrode surface. . In addition, in this invention, the measurement of the gas molecules which adsorb | suck directly to a quartz surface using the electrodeless induction pulse piezoelectric resonance method is also possible.