Adv. Module Process Dev. Div., Macronix Int. Co., Ltd., Hsinchu, Taiwan;
chemical mechanical polishing; finite element analysis; semiconductor industry; slurries; CMP process simulation; CMP process tuning; CMP working mechanism; Chemical-mechanical polishing technique; chemical reaction; complex process parameter; defect control; feeding slurry; finite element method; fluid simulation; mechanical simulation; pattern damage analysis; polishing pad; semiconductor industry; slurry behavior analysis; uniformity control; Finite element analysis; Fluids; Mathematical model; Predictive models; Se;
机译:CMP机械过程中非牛顿浆液中纳米颗粒的行为
机译:CMP机械过程中非牛顿浆液中纳米颗粒的行为
机译:浅沟槽隔离化学机械抛光(STI-CMP)中二氧化铈浆料的纳米形貌影响和非Prestonian行为
机译:机械流体模拟CMP工艺的模式损伤及浆料行为分析 - 叶盛成,YI-Cheng
机译:研究新型氧化铝纳米磨料及其在铜化学机械平面化(CMP)浆料中与基本化学成分的相互作用。
机译:不锈钢304(SS304)流化床化学机械抛光(FB-CMP)工艺初步研究(SS304)
机译:电化学 - 机械平面化(eCmp),使用非常规浆料的sTI Cmp