Preliminary Study on Fluidized Bed Chemical Mechanical Polishing (FB-CMP) Process for Stainless Steel 304 (SS304)

摘要

Fluidized bed machining (FBM) is used for the surface finishing or cleaning of complex 3D machine parts. FBM is a process of injecting air into a chamber to encourage particles into a fluid-like state. Subsequently, FBM involves rotating the specimen at high speed to process the surface of the material. However, owing to the long processing time involved in FBM, there is a limit to its application in various industries. In this paper, we propose a fluidized bed chemical mechanical polishing (FB-CMP) process, wherein the material removal mechanism of chemical mechanical polishing (CMP) is applied to FBM to improve the processing efficiency of FBM. An FB-CMP system was prepared, and preliminary experiments on the chemical solution were conducted using stainless steel 304 (SS304) plates. In the experiment, hydrogen peroxide (H O ) was used as the oxidant, oxalic acid (C H O ) was used as the complexing agent and alumina (Al O ) was used as the abrasive particle. The material removal rate (MRR) and roughness reduction rate during the FB-CMP of SS304 were dependent on the composition of the chemical solution. The experimental results revealed the highest MRR and roughness reduction rate at 0.33 wt % H O and 0.2 wt % oxalic acid. To stabilize the proposed FB-CMP process, it is necessary to examine the chemical solutions of various materials.