MEMS-IDT-based microaccelerometers and gyroscopes

摘要

Abstract: The integration of MEMS, IDTs and required microelectronics and conformal antenna to realize a hybrid accelerometer and gyroscope device is presented in this paper. The inertial navigation system uses both gyroscopes and accelerometers to measure the state of motion of a target or a missile by sensing the changes in that state caused by accelerations. This unique combination of technologies results in conformal sensors that can be remotely sensed by a RF system with the advantage of no power requirements at the sensor site. The device presented here possess typical advantages of MEM sensors including the additional benefits of robustness, excellent sensitivity, surface conformability, durability and applicability to wireless antenna systems. Compared to conventional ones, these new sensor have no moving mechanical parts ultimately giving rise to inherent robustness and durability. Consequently, there is no electronics to balance or measure the movement of moving structures, which leads to even smaller micro device. !18