METHOD OF FORMING TEST IMPACT moving mass of a micromechanical gyroscope based on it method for adjusting the resonant frequency SUSPENSION moving mass of a micromechanical gyroscope, METHOD FOR DETERMINING THIS suspension phase shift and method for continuous testing of correct operation of a micromechanical gyroscope, the electrode structure to generate test IMPACT moving mass of a micromechanical gyroscope and micromechanical gyroscope (optional), which implements the method and the electrode structure

摘要

FIELD: physics.;SUBSTANCE: invention relates to micromechanics, particularly to vibration-type micromechanical gyroscopes (MMG) in which position of the mobile mass (MM) on the axis of primary oscillations γ(t) varies according to the expression γ(t)=sin(ω₁t). In order to adjust parameters of the oscillating circuit of the suspension and parametres of electronic components for monitoring correct operation, a test effect of the form B(t)sin(ω₁t) is created on the mobile mass by varying voltage across electrodes lying over the lateral faces of the mobile mass, or by connecting the electrodes of the secondary oscillation channel of the micromechanical gyroscope to a signal source proportional to B(t)sin(ω₁t), which can be formed using a modulator connected to the motion sensor of the mobile mass on the axis of primary oscillations and a voltage source B(t). The control signal for parametre automatic adjustment systems in the micromechanical gyroscope is extracted through successive demodulation of the signal from the motion sensor of the mobile mass on the axis of secondary oscillations using demodulators with reference signals sin(ω₁t) and B(t). To adjust the resonance frequency of the suspension of the micromechanical gyroscope, the control signal is transmitted to electrodes of the secondary oscillation channel, and when adjusting phase shift of the signal of the secondary oscillation channel, this signal is transmitted to the control input of a phase-shifting circuit. In order to vary the slope of the micromechanical gyroscope in which there is automatic adjustment of resonant frequency with a series differentiating element, there is a device with a variable transfer constant. Continuous testing of correct operation of the micromechanical gyroscope is done by comparing signals generated in the micromechanical gyroscope due to the testing effect, with standard signals.;EFFECT: increased accuracy and faster operation of the micromechanical gyroscope, simplification of the design of the micromechanical gyroscope.;16 cl, 11 dwg