Microstructural studies of CVD diamond films by transmissin electron microscopy

摘要

Microstructural properties of CVD diamond films have been studied by transmission electron microscopy.TEM observations show that the density and distribution of the main structural defects i.e. microtwins and stacking faults are strongly dependent on the film growth textures.A high density of structural defects was observed in films with a carliflower-like defects were mainly located at regions inthe vicinity of grain boundaries,few defects were observed within the main body of the <100> textured crystal grains.