先进的电子断层扫描技术在材料科学中的发展--基于透射电子显微镜和扫描透射电子显微镜

摘要

The recent developments of electron tomography (ET) based on transmission electron microscopy (TEM) and scanning transmission electron microscopy (STEM) in the field of materials science were introduced. The various types of ET based on TEM as well as STEM were described in detail, which included bright-field (BF)-TEM tomography, dark-field (DF)-TEM tomography, weak-beam dark-field (WBDF)-TEM tomography, annular dark-field (ADF)-TEM tomography, energy-filtered transmission electron microscopy (EFTEM) tomography, high-angle annular dark-field (HAADF)-STEM tomography, ADF-STEM tomography, incoherent bright field (IBF)-STEM tomography, electron energy loss spectroscopy (EELS)-STEM tomography and X-ray energy dispersive spectrometry (XEDS)-STEM tomography, and so on. The optimized tilt series such as dual-axis tilt tomography, on-axis tilt tomography, conical tilt tomography and equally-sloped tomography (EST) were reported. The advanced reconstruction algorithms, such as discrete algebraic reconstruction technique (DART), compressed sensing (CS) algorithm and EST were overviewed. At last, the development tendency of ET in materials science was presented.%介绍了基于透射电子显微镜和扫描透射电子显微镜的电子断层扫描技术在材料科学领域的最新进展。详细地描述各种电子断层扫描的类型：基于透射电子显微镜的断层扫描技术包括明场断层扫描、暗场断层扫描、弱束暗场断层扫描、环形暗场断层扫描和能量过滤断层扫描；基于扫描透射电子显微镜的断层扫描技术包括高角环形暗场断层扫描、环形暗场断层扫描，非共格明场断层扫描、电子能量损失谱断层扫描和X射线能谱断层扫描。报道了优化的倾转系列，比如双轴倾转、同轴倾转、锥形倾转以及等斜率倾转等。总结了先进的重构算法包括离散迭代重构技术、压缩传感算法以及等斜率算法。最后，提出了电子断层扫描技术在材料科学中的发展趋势。