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Self-supporting CVD diamond film and method for producing a self-supporting CVD diamond film

机译:自支撑式CVD金刚石膜及其制造方法

摘要

The invention relates to a self-supporting CVD diamond film comprising a plurality of diamond layers (8) lying one over the other, wherein a lower side of each diamond layer (8) is made of diamond having a first average crystal size of 2 to 50 nm, wherein the average crystal size increases within the diamond layer (8) from the lower side to an upper side of the diamond layer (8), and wherein a second average crystal size in the area of the upper side is 50 to 500 nm.
机译:本发明涉及一种自支撑的CVD金刚石膜,该膜包括彼此叠置的多个金刚石层( 8 ),其中每个金刚石层( 8 )的下侧)由具有2至50 nm的第一平均晶体尺寸的金刚石制成,其中平均晶体尺寸在金刚石层( 8 )内从金刚石层的下侧到上侧增加 8 ),其中上侧区域中的第二平均晶体尺寸为50至500 nm。

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