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Self-supporting CVD diamond film and method for producing a self-supporting CVD diamond film
Self-supporting CVD diamond film and method for producing a self-supporting CVD diamond film
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机译:自支撑式CVD金刚石膜及其制造方法
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摘要
The invention relates to a self-supporting CVD diamond film comprising a plurality of diamond layers (8) lying one over the other, wherein a lower side of each diamond layer (8) is made of diamond having a first average crystal size of 2 to 50 nm, wherein the average crystal size increases within the diamond layer (8) from the lower side to an upper side of the diamond layer (8), and wherein a second average crystal size in the area of the upper side is 50 to 500 nm.
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