Extreme ultraviolet source development: A comparison of different concepts

摘要

We discuss the results of the studies of Z-pinch sources for photolithographic applications developed by Lambda Physik. We also report the results of fundamental investigations purused by Fraunhofer-Institut fur Lasertechnik, Friedrich-Schiller Universitat Jena, Max-Born Institut Berlin, and Gustav August Universitat Gottingen. The later efforts are supported by German government and steered by the industrial consortium led by Lambda Physik.