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Reliability investigations of large die wafer level packages: Optimization of package structure and materials to improve board level reliability

机译:大型晶片级封装的可靠性研究:优化封装结构和材料以提高板级可靠性

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Wafer level packaging (WLP) of electronic components has become increasingly popular in recent years. The WLP package has the same foot print as the die and is therefore the smallest package possible. This is important for applications where maximum functionality is required in a small space, especially for mobile devices. The largest package sizes and pin counts used for WLP components have steadily increased in recent years. As the mechanical stresses in WLP packages increase with die size as well, board level reliability becomes a major concern. As such, the questions arise: what is the maximum die size possible for a WLP to meet board level reliability requirements and, for a given package size, how can the board level reliability be improved? To start to answer these questions, we have designed a large die test vehicle based on a dummy wafer (8×8 mm in size with 444 connections at 0.4mm pitch) with features in the package that are common to devices in production today, such as redistribution traces, polymer passivation layers, under bump metallization, and solder balls for interconnection to the test board. Using wafer level processes, we have assembled the test vehicles under different conditions in a design of experiment. We varied the parameters of polymer passivation thickness, redistribution trace thickness, and final die thickness and then characterized the board level reliability under temperature cycling and drop test conditions for a statistically significant sample size.
机译:近年来,电子元件的晶圆级封装(WLP)变得越来越流行。 WLP封装具有与管芯相同的封装,因此是可能的最小封装。这对于在狭小空间中需要最大功能的应用程序尤其重要,特别是对于移动设备。近年来,用于WLP组件的最大封装尺寸和引脚数一直在稳定增长。随着WLP封装中的机械应力也随着管芯尺寸的增加而增加,电路板级的可靠性成为主要问题。因此,出现了以下问题:WLP满足板级可靠性要求的最大裸片尺寸是多少?对于给定的封装尺寸,如何提高板级可靠性?为了回答这些问题,我们设计了一种基于虚拟晶圆(尺寸为8×8 mm,间距为444mm,444个连接)的大型裸片测试车,该封装具有当今生产中的设备所共有的功能,例如作为重新分布的迹线,凸点金属化下的聚合物钝化层以及用于与测试板互连的焊球。使用晶圆级工艺,我们通过实验设计在不同条件下组装了测试车辆。我们改变了聚合物钝化层厚度,再分布迹线厚度和最终管芯厚度的参数,然后在温度循环和跌落测试条件下表征了具有统计学意义的样本量时板级可靠性。

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