X-ray sensor based on pixelated scintillation film on photodiode arrays

摘要

A X-ray sensor based on pixelated CsI:Tl scintillation directly deposited on 6 ×6 P+/Nwell/Psub photodiode arrays was proposed in this paper. The photodiode arrays fabricated through high temperature diffusion and photolithography technology has sensitivity about 10nA/lux under visible light and leak current about 1.2nA. The pixelation of scintillation was achieved by on-chip netlike SU-8 photoresist. The SU-8 photoresist is 81.6um in height and 25um in width.