How to influence the exhaust rate of molecular vacuum pumps and molecular vacuum pumps

摘要

The pump speed of a molecular vacuum pump can be easily and accurately affected at a specific position of a molecular vacuum pump.Molecular vacuum pump 250In a method of affecting 280 exhaust ratesMolecular vacuum pumpAt least one molecular pump stage 252254296Having 298By molecular pump stageA gaseous mediumInlet 256 of molecular vacuum pump258288From 290 to the outlet, pressure can be sent along the flow path;Pump stagePumping direction andIt has a transverse cross-section relative to the pumping direction.To the exhaust rate at the first position in the flow of the molecular vacuum pumpThat is,The effect of providing a block element 262 at a second position different from the first position in the flow of the molecular vacuum pump is affected.By block elementThe pass sections are locally reduced.Diagram