Turbo molecular pump has integrated pressure sensor, at pre-vacuum zone, to give actual pressure conditions at outflow from turbo rotor

摘要

The turbo molecular pump (10) has a high vacuum zone (20) and a pre-vacuum zone (22). A pressure sensor (30) is integrated into the wall (34) of the housing (18) at the pre-vacuum zone, in the path of a gas channel (24) between the turbo rotor (16) and the gas outflow flange (26). The pressure sensor is linked to a control (40) to operate the rotor drive according to the sensor signals.