Ultra-High Speed Vacuum Pump System with First Stage Turbofan and Second Stage Turbomolecular Pump.

摘要

An ultra-high speed vacuum pump evacuation system includes a first stage ultra-high speed turbofan and a second stage conventional turbomolecular pump. The turbofan is either connected in series to a chamber to be evacuated, or is optionally disposed entirely within the chamber. The turbofan employs large diameter rotor blades operating at high linear blade velocity to impart an ultra-high pumping speed to a fluid. The second stage turbomolecular pump is fluidly connected downstream from the first stage turbofan. In operation, the first stage turbofan operates in a pre-existing vacuum, with the fluid asserting only small axial forces upon the rotor blades. The turbofan imparts a velocity to fluid particles towards an outlet at a high volume rate, but moderate compression ratio. The second stage conventional turbomolecular pump then compresses the fluid to pressures for evacuation by a roughing pump.