Semiconductor devices comprising unipolar hot-carrier transistors and methods of manufacturing the same

摘要

Semiconductor devices comprising one or more gate-controlled unipolar hot-carrier transistors are disclosed having a semiconductor barrier region (3) located between laterally-separated first and second region portions (1,2a) of one conductivity type. The barrier region (3) has a net doping concentration of the opposite conductivity type and is sufficiently thin that the depletion layers formed at zero bias with both the first and second regions (1, 2) merge together substantially to deplete said barrier region (3) of mobile charge carriers. Current flow (12) between the first and second regions (1, 2) is at least partially by thermionic emission of charge carriers of said one conductivity type across the barrier region (3) at a major surface (11) of the body (10). The transistor has a gate (15) in the vicinity of the barrier region (3) and capacitively coupled thereto (for example via dielectric layer (18)) so as to permit the thermionic emission current (12) to be controlled by applying a voltage VGK) to the gate (15) to adjust the effective barrier height of the barrier region (3). Such transistors can be very compact and can have a fast response time with strong gate control. The gate (15) may be located on either side of the barrier region (3), and junction-gates as well as insulated-gates are described.