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GROWTH OF BETA-SIC THIN FILMS AND SEMICONDUCTOR DEVICES FABRICATED THEREON
GROWTH OF BETA-SIC THIN FILMS AND SEMICONDUCTOR DEVICES FABRICATED THEREON
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机译:BETA-SIC薄膜的生长及其制造的半导体器件
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GROWTH OF BETA-SiC THIN FILMS ANDSEMICONDUCTOR DEVICES FABRICATED THEREONAbstract of the DisclosureDevice quality thin films of Beta-SiC areepitaxially grown on substrates of Alpha-Sic.
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